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Extensive developments have been in progress in recent years to make robots that can move and inspect in narrow space which is not accessible to human such as sewer pipe, and small opening among buildings. In this paper, we focus on narrow space between two walls and introduce a novel wall climbing robot that can move in vertical narrow space. This robot is composed of two driving modules and a pantograph...
In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. Aiming at a systematic design of the both control systems, at first, the 6-degree of freedom equipment is...
In this paper, a design method of the reaction force control system for ultra-precision stage which equips vibration control system, is proposed. Taking the application to semiconductor manufacturing into consideration, the designed system deals with both the reaction force due to the stage movement and the vibration from the external environment. The experimental setup for a 6-degree of freedom (DOF)...
The paper deals with vibration suppression control of flexible structures applying a fuzzy controller. Due to the complexity of the mathematical model related to the flexible structures, due to the restriction imposed by the actuator (force stroke limitation) as well as economical aspects, a fuzzy logic based approach of the control system is proposed. The experimental results using a fuzzy controller...
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