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Electric power steering (EPS) is gradually replacing the conventional hydraulic power steering system in modern cars. The main advantages of EPS system are the ability to minimize energy consumption and its applicability to autonomous driving. This paper discusses the linear quadratic (LQ) control to reduce effort- and time-consuming manual tuning and improve steering feel compared to conventional...
Extensive developments have been in progress in recent years to make robots that can move and inspect in narrow space which is not accessible to human such as sewer pipe, and small opening among buildings. In this paper, we focus on narrow space between two walls and introduce a novel wall climbing robot that can move in vertical narrow space. This robot is composed of two driving modules and a pantograph...
In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. In the present paper, aiming at a systematic design of the both control systems, the 6-degree of freedom...
This paper deals with the high-precision positioning control of a dual-stage feed drive. The control system is constructed using an equivalent-input-disturbance approach to improve the disturbance rejection performance. The design procedure is explained, and a numerical example demonstrates both the validity of the method and its advantages over a method based on a disturbance observer.
In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. Aiming at a systematic design of the both control systems, at first, the 6-degree of freedom equipment is...
In this paper, a design method of the reaction force control system for ultra-precision stage which equips vibration control system, is proposed. Taking the application to semiconductor manufacturing into consideration, the designed system deals with both the reaction force due to the stage movement and the vibration from the external environment. The experimental setup for a 6-degree of freedom (DOF)...
In the manufacturing industry especially in the semiconductor, the requirement for high-speed, fast-response and high-precision performances is critical. In this paper, the model predictive control is introduced to the positioning control of ultra-precision stage driven by a linear actuator. The linear actuator is the non-resonant ultra-sonic motor (SPIDER) which has the strong non-linearity due to...
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