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In this work, we present the integration of functionalized tin dioxide gas sensors on CMOS fabricated microhotplate chips. Spray pyrolysis was used to deposit the gas sensitive films, with a thickness of 50 nm, on CMOS microhotplates. The SnO2 thin films were functionalized with noble bimetallic nanoparticles — PdAu — by inkjet printing and the influence of the nanoparticles on the sensor performance...
We present H2S gas sensor devices based on tungsten oxide nanowire networks, which are integrated on CMOS fabricated microhotplate chips. Such CMOS integrated systems are promising candidates for realizing smart sensor devices for consumer market applications. The CMOS tungsten oxide gas sensors were prepared by the deposition of nanowire networks onto interdigitated electrodes on CMOS microhotplates...
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