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This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around...
This paper presents a small wearable anemometer for detecting two dimensional wind vector by using a micro thermal flow sensor incorporated with a wireless mobile device. The flow sensor consists of three roundabout Pt hot-wires uniformly distributed in a circle fabricated on a flexible polyimide substrate using micromachining technique. The anemometer integrates the thermal flow sensor, a miniaturized...
Body Sensor Networks (BSNs) integrating micro sensor nodes with wireless communication are becoming flourishing in medical applications. This paper demonstrates a BSN-based portable monitor integrating micro sensors with mobile devices for monitoring and diagnosing obstructive sleep apnea syndrome (OSAS) at home. The system uses a micro hotfilm flow sensor to detect respiratory flow, uses tri-axis...
We demonstrate our researches on developing micro thermal flow sensors by depositing nano metallic films on flexible substrates for detecting surface flow. The fabrication of the sensors is incorporating standard printed circuit technique with micromachining deposit/sputter, which takes advantages of low cost, easy fabrication, easy packaging and integrating sensors with processing circuits. The applications...
We present a portable, low cost, sensitive respiration monitoring system based on a micro hot-film flow sensor. The sensitive component of the flow sensor is a patterned thin-film with nanometer thickness fabricated on a flexible polyimide substrate by incorporating printed circuit technique with micromachining technique. The respiratory flow measurement is under a constanttemperature mode, and the...
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