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In recent years, there has been an increasing interest in robots' tactile sense, which enables safer, more reliable and accurate human-robot communication for the future society. So far, we have developed a capacitive type tactile sensor network system for implementing a large number of sensors with MEMS-CMOS integration technologies [1–3, 9]. Considering practical use for the robot, multiple kind...
This paper describes a MEMS-CMOS integrated tactile sensor for surface mounting on a flexible and stretchable bus line. The sensor is featured by the following configurations; (1) A sensing diaphragm is formed on a CMOS substrate by backside etching, and (2) the CMOS substrate is flip-bonded to a special low temperature cofired ceramic (LTCC) substrate with Au through vias. The flipped CMOS substrate...
This paper reports a 3-axis MEMS-CMOS integrated tactile sensor for surface-mounting on a flexible bus line. This 3-axis sensor uses a bran-new CMOS LSI with capacitive sensing circuit and other extended functionalities (e.g. configurability and a robust clock data recovery algorithm). The sensor is composed of a flip-bonded CMOS substrate with a sensing diaphragm and a special low temperature co-fired...
A new blind oversampling clock and data recovery (BO-CDR) algorithm is proposed. It has high tolerance to low-frequency jitter (14.8 unit intervals at 10 kHz, measured at 640 Mbps) and is suitable for systems where the receiver clock has high drift with respect to the transmission. The algorithm is capable of recovering data over a wide tracking range or when the precise oversampling rate (β) is not...
The proposed time-to-digital converter is based on a Schmitt trigger monostable multivibrator and an external thermistor with a negative temperature coefficient. It is used to implement an ultra-low-power (105 pJ/conversion measured) temperature sensor. The sensor has significantly lower power (1/250) than state of the art diode/ADC temperature sensors. The proposed temperature sensor also dissipates...
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