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SrHfON thin films were deposited on Si substrate by radio frequency (RF) magnetron reactive sputtering. Composition, structure and optical properties of the SrHfON films in relation to rapid thermal annealing (RTA) temperatures were analyzed by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and spectroscopic ellipsometry (SE). The XPS analysis indicates that the peaks of Sr 3d, Hf...
In the present, most of the transparent conductive films have high transmission in visible, while they have low transmission in infrared waveband. In this paper, the infrared transparent conductive films of CuxAlyOz were prepared by using radio-frequency (R.F.) magnetron sputtering deposition. Influences of sputtering power on structure and optical properties of the CuxAlyOz films have been investigated...
HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and UV Raman spectrum. XRD and Raman measurements show that the as-deposited films are mainly...
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