In the present, most of the transparent conductive films have high transmission in visible, while they have low transmission in infrared waveband. In this paper, the infrared transparent conductive films of CuxAlyOz were prepared by using radio-frequency (R.F.) magnetron sputtering deposition. Influences of sputtering power on structure and optical properties of the CuxAlyOz films have been investigated. Structure of the CuxAlyOz films was characterized by means of grazing incidence x-ray diffraction (GIXRD). Thickness, refractive index and extinction coefficient of the CuxAlyOz films were determined by spectroscopic ellipsometry method. The infrared transmission of the CuxAlyOz films was measured by Fourier Transform Infrared (FTIR) spectrometer. XRD analyses show that the CuxAlyOz films remain amorphous with the increase of the sputtering power. With the increasing sputtering power of the Al target, the deposition rate and infrared transmission of the CuxAlyOz films increase with the decrease in the refractive index.