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We present a complete, fully functional energy-autonomous audio sensor node with 6×5×4mm3 form factor. The system uses a new audio processing IC integrated with a MEMS microphone, general purpose 32-bit processor, 8Mb Flash, RF transceiver with custom 3D antenna, PV cells for energy harvesting and battery. The 4.7μW audio processing IC performs audio acquisition with 4–32× compression. The complete...
The increasing popularity of mobile devices such as smart phones in applications including smart payments and personal health sets a pressing need for improved security without compromised ease of use. Fingerprint recognition has emerged as a particularly attractive option. Unfortunately, present capacitive solutions suffer from poor accuracy in the presence of contamination such as perspiration,...
A monolithic MEMS-CMOS rangefinder using piezoelectric micromachined ultrasonic transducers (PMUTs) is presented. A dual-electrode PMUT design is used where the center electrode is driven externally to transmit an ultrasound pulse and the outer ring electrode is used to sense the returning echoes. We designed, fabricated, and characterized devices at two nominal Si thicknesses, 2 μm and 5 μm, designed...
A dual mass vibratory gyroscope sensor demonstrates the quadrature frequency modulated (QFM) operating mode, where the frequency of the circular orbit of a proof mass is measured to detect angular rate. In comparison to the mode-matched open loop rate mode, the QFM mode receives the same benefit of improved SNR but without the penalties of unreliable scale factor and decreased bandwidth. A matched...
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