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This paper describes a demonstration of power enhancement by nonlinear oscillation in a millimeter-sized electrostatic vibrational energy harvester for the future Internet of Things. To attain nonlinearity in the microelectromechanical-system (MEMS) device, a gold spring, which has a lower value of Young's modulus than conventional materials, is adopted as a component of the MEMS structure. The nonlinear...
This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20...
Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by...
A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.
We have investigated the electrical characteristics of tantalum oxy-nitride (TaON) films deposited using electron cyclotron resonance (ECR) plasma sputtering. A pure tantalum metal target was used as raw material combined with gases of oxygen and nitrogen. The electrical properties have been measured using metal–insulator–metal (MIM) structures of Al/TaON/Ru/Si or metal–insulator–semiconductor (MIS)...
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