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Werden — wie hier in Bezug auf das Innovationsmanagement — Konzepte für Klein- und Mittelunternehmen (KMU) aus ökonomischer Sicht behandelt, so wird damit impliziert, dass die konzeptionelle Gestaltung dieser unternehmerischen Funktion signifikante Unterschiede in Abhängigkeit von der Betriebsgröße aufweist. Die konzeptionelle Gestaltung des Innovationsmanagements von Großunternehmungen kann offenbar...
Wafer/pad temperatures are measured for various elastomer materials for control of wafer temperatures during high-power implantation to less than 40 C. Wafer/pad temperatures during and directly following implant are monitored by in-situ IR sensors and tracked over long operational cycles. Beneficial effects of wafer temperature control is noted for gain characteristics of modern IC devices.
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