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We report the increase in the quality factor of superconducting radiofrequency cavities when small concentrations of nonmagnetic impurities such as titanium and nitrogen are thermally diffused into the inner surface. Several cavities made from ingot niobium with residual resistivity ratio (RRR) $\sim$ 100–300 and a fine-grain reactor grade cavity with RRR $<$ 100 were thermally doped with titanium...