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In this paper, we studied defect discovery and defect review using back-scattered electron (BSE) images. We found that some defects can only be effectively imaged with BSE mode such as hafnium oxide remain at metal gate chemical mechanical polishing (CMP) in the gate last high-k metal gate (HKMG) process. It can also enhance contrast for materials in the bottom of high aspect ratio (HAR) trenches...
Intensified globalization and consequent competitive pressures have reemphasized the importance of third party logistics (3PL). Logistics distribution management is the core of logistics management. In this paper, We study a mathematics method to determine the logistics distribution location for reducing the logistics costs.
A quantum neural networks model based on quantum neurons and traditional neurons is presented in this paper. The input of quantum neuron is real vector, its weight is quantum bits, its transforming function is an inner product operator and its output is a real number. The network includes three layers. Input layer is composed of traditional neurons that receive input information. Hidden layer is composed...
This paper presents an approach to enhance the defect detection sensitivity with the use of electron beam inspection tool in presence of optical light illumination. Optical light is believed to interact with reversed biased NMOS devices and gate oxide under inspection which either induces photocurrent across junction on NMOS, or stimulates leakage current across thin gate oxide. This enhances the...
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