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This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed...
This paper reports a kind of intercoupled silicon dual-microcantilevers for ultrasensitive mass detection based on the relative change in the amplitude ratio of the out-of-phase vibration eigenstate of the dual-cantilevers. The structural intercoupling of the dual-cantilevers arises from the coupling overhang connecting them at the base. The whole structure operation is excited by a piezoactuator...
In summary, this study successfully demonstrates the design and implementation of high performance CMOS condenser microphones. Microphone with a flat frequency response between 100 Hz~20 KHz have been fabricated in a reproducible way. The interlace slots structure not only reduce the intrinsic stress of diaphragm also changing the stiffness of diaphragm and shrink the size of membrane. The major advantage...
Lifetime projections for polycrystalline silicon (poly) gate single doping type capacitors are complicated by gate poly depletion and inversion during the accelerated test. The presence of poly depletion and inversion was experimentally confirmed by CV and IV measurements. Simple high field straight line extrapolation was found to overestimate the 5-V lifetime by 1200 times in the 68-AA oxide equivalent...
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