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We demonstrated an integration of enhancement-mode single-crystalline n-channel thin-film transistor (TFT) and n+/p diodes for light detection/emission based on the single-crystalline GeSn alloy grown on a transparent substrate. Owing to the excellent crystal quality of GeSn layer and a high-quality n+/p junction, a record-high electron mobility of 271 cm2/Vs and a room-temperature near-infrared electroluminescence...
Record-high mobility Ge-based TFT (μfe: 423 cm2/Vs) and significant enhancement of near-infrared (NIR) luminescence (×54 Ge bulk) were demonstrated with single-crystalline GeSn layer on transparent substrate grown by a novel liquid-phase crystallization technique. Our GeSn growth scheme is fully compatible with the conventional CMOS process and can provide high-quality tensile-strained p- and n-type...
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