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It's a challenge to figure out the frequency response of a capacitive MEMS device due to the large coupling noises introduced by the parasitic capacitors. We present a new method to measure the frequency response based on the third harmonic detection. Different from previous methods, the frequency of the measured signal in our method is triple as that of the exciting voltage, so there is no coupling...
In order to suppress the quadrature error in micromachined gyroscopes, various decoupled structures have been designed employing independent suspension beams for the drive and sense modes. The new decoupled structure presented in this paper employs a vibration isolation frame and independent inertial masses for the drive and sense modes. This frame can not only prevent the oscillation of the drive...
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