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This paper reports a novel, low-cost and inherently simple vertical signal transmission method for glass-silicon-glass sandwich micro-electro-mechanical systems (MEMS) gyroscopes based on heavily doped silicon-bridge. As for the fabrication technique, only glass-to-silicon anodic bonding and after-laser-trimming process are needed, which are fully compatible with standard MEMS technology. Micro gyroscopes...
This paper presents a novel micro shell resonator (MSR) with eight circular-distributed T-shape masses based on fused silica (FS), which is fabricated by combining micro blowing-torch process with high precise mold. FS is been heated instantaneously above the softening point by micro blowing-torch and flow down into the mold. The resonator shell is shaped using a pressure difference and surface tension...
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