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Traditional method of selecting SVID, setting up FDC models and SPC alarm rules often depends on past experiences and abnormal cases. It's hard to achieve the overall FDC coverage across different tool types. In this paper, we adopt EQ subsystems concept into FDC model template and roll out these models throughout the fab by using combine charts. It can rapidly improve FDC coverage rate and hit rate...
Unusually there was only in-line monitor to check the post maintenance quality in semiconductor fab, especial in frond-end process. As these are 1∼ 2 months time form frond-end tool to WAT/CP test. If the post maintenance monitor is OK, but something wrong at WAT/CP test, there will be huge loss. There are many methods to mention the post maintenance quality control by FDC metrology. But most of them...
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