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A fully-symmetrical resonant pressure sensor based upon lateral drive is presented, which can avoid stress concentration that arises from temperature or vacuum packaging. Unlike conventional driving method, resonant structure with laterally driven comb capacitance allows the linear characteristic of driving force and also obtains high quality factor for its slide-film air damping. Furthermore, the...
A novel non-contact micro manufacturing technology of aerosol deposition is presented to fabricate conductive micro silver wires with width of several micrometers from silver inks. The ceramic nozzle with inner diameter of 250 µm is utilized to print the micro silver wires, the width of wires ranges from 15 µm to 70 µm and the thickness ranges from 200 nm to 2 µm. The printed silver wires are cured...
A simple and low-cost method is suggested to fabricate nanochannels via Near-Field Electrospinning (NFES). In this process, orderly and patterned nanofibers direct-written by NFES are used as sacrificial templates. Well-defined nanochannels are available after the removal process of both sacrificial fibers and material coating over the fibers. The sacrificial fiber, controlled by NFES, dominates the...
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