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This paper presents the design and characterization of a lock-in pixel array based on a buried channel photo-detector aimed at time-of-flight range imaging. The proposed photo-demodulator has been integrated in a 10-μm pixel pitch with a fill factor of 24%, and is capable of a maximum demodulation frequency of 50 MHz with a contrast of 29.5%. The sensor has been fabricated in a 0.18-μm CMOS imaging...
A lock-in pixel array based on a fast charge transfer pinned photo-detector for time-of-flight range imaging is presented. Distance measurements at 5-to-20 fps on a 6-to-3m range are reported with a linearity error lower than 0.7% and a repeatability of 5-to-16 cm, while the best achievable precision is 2.7 cm. A demodulation frequency up to 50 MHz is demonstrated with a contrast of 29.5%.
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