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We report a fabrication method for silicon-embedded toroidal inductors with multi-layer windings, based on 3D shadow mask technology. Such multilayer devices boost inductance density within a limited footprint, which is vital for realization of integrated high-power high-frequency power converters. Fabrication of embedded toroidal inductors with double-layer windings is illustrated; characterization...
An approach to the ultimate integration and miniaturization of MEMS-based 3-D magnetic components involves embedding the volume of the magnetic structures within the volume of the silicon wafer itself, exploiting microfabricated windings to create current paths, and utilizing embedded magnetic cores within the limited footprint of these components to boost the magnetic performance. However, this embedding...
This paper presents the derivation and verification of a sinusoidal-steady-state equivalent-circuit model for microfabricated inductors developed for use in integrated power electronics. These inductors have a low profile, a toroidal air core, and a single-layer winding fabricated via high-aspect-ratio molding and electroplating. Such inductors inevitably have a significant gap between winding turns...
This paper reports an optimized design and micro-fabrication approach for silicon-integrated elongated-spiral inductors for on-chip power conversion. The inductors are designed for high-power-density and high-efficiency DC-DC converters which transfer 25 W of power at frequencies between 5 and 30 MHz. The predicted power density of the inductors is close to 1 W/mm(exp 2) with predicted overall converter...
This paper presents a CMOS-compatible process for fabrication of 3D structures embedded in the volume of a silicon wafer, and capable of interconnection to circuitry on the wafer surface. The key challenge of embedding structures in the silicon substrate is processing inside deep silicon trenches. This difficulty is overcome by means of several key techniques: multilevel wafer etching; cavity shaping;...
The unilaterally lesioned rat model of Parkinson's disease which fails to orient to the food stimuli presented on the contralateral side of its preferential side of body could be induced by the injection of 6-hydroxydopamine (6-OHDA) into the medial forebrain bundle (MFB). We employed transcranial direct current stimulation (tDCS, current intensity: 80 μA, and 40 μA; anodal electrode area: 3.14 mm...
This paper presents the design, simulation, fabrication, and experimental characterization of a multi-layer spiral inductor that acts as the receiver coil for watt-level wireless power transfer. The inductor was designed with multiple vertical laminations where 88-μm-thick copper coils were separated by 25-μm-thick Kapton films using a flexible PCB fabrication technique. This Cu-Kapton approach has...
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