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A capacitively transduced micromechanical resonator constructed in hot filament CVD boron-doped microcrystalline diamond (MCD) structural material has posted a measured Q of 146,580 at 232.441 kHz, which is 3× higher than the previous high for conductive polydiamond. Moreover, radial-contour mode disk resonators fabricated in the same MCD film and using material mismatched stems, cf., Figure 1, exhibit...
This paper discusses large area uniform diamond coatings deposited in the sp 3 Inc. Model 600 hot filament diamond deposition system (made by sp 3 Inc., California, USA). This model combines proven hot filament thermal reactor technology with advanced controls to produce high quality polycrystalline diamond films over a maximum square area of 380 mm×380 mm on a wide variety of substrate...
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