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A novel parallel plate capacitive tactile sensor design has been proposed which for the same deflection of the top electrode shows manifold improvement in sensitivity over present designs. Using a dielectric droplet leads to a simultaneous change in the capacitance area and gap leading to enhanced sensitivity. The proposed design is validated through modelling and experiments.
Thin films of BaTiO3-CuO doped with Ag have been evaluated for their carbon dioxide sensing characteristics. The effect of various parameters, such as Ag doping, annealing conditions, film thickness, electrode dimensions, and operating temperature on sensitivity has been explored. The thin films in the range of 250 nm, with 1% Ag doping and no post-deposition annealing, display the best sensitivity...
Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO3-CuO on Ag-doped BaTiO3-CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped...
Anodized titania, synthesized on oxidized silicon substrate, has been used as oxygen gas sensor. The as-anodized films resulted in a sensitivity of 5756% at 125°C, when exposed to 100% oxygen. The gas-sensing performance of anodized films has been evaluated with post-anodization treatment in de-ionized water and aqueous ammonia solution. The sensitivity increases to 8646% and 16599%, with post-treatment...
FET based MEMS microphones comprise of a flexible diaphragm that works as the moving gate of the transistor. The integrated electromechanical transducer can be made more sensitive to external sound pressure either by increasing the mechanical or the electrical sensitivities. We propose a method of increasing the overall sensitivity of the microphone by increasing its electrical sensitivity. The proposed...
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