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An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/...
We demonstrate a novel way to control the coupling rate in coupled ring resonators by controlling the relative position of the nanowires between the two cavities to modulate the resonance frequencies. A new system is presented and experimental results show that by tuning the coupling rate, the coupled ring resonators can be stimulated at the same time due to the same resonance frequency. This study...
An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU...
This paper presents a novel high temperature SOI pressure sensor utilizing Cu-Sn wafer level bonding. Fabrication process and bonding procedure are described in detail. For high temperature operation, heavily doped piezoresistors and TiSi2/Ti/ TiN/Pt/Au ohmic contact electrode are specially designed. To fabricate Cu sealing ring on the wafer with 380pm-deep cavities, spray coating method has been...
This paper demonstrates the optically induced self-excited relaxation oscillation in a silicon ring resonator for the first time. The observed thermo-optomechanical oscillation has a unique waveform with fast oscillation period close to 16 ns and slow oscillation period approximately 167 ns. The ultra-fast oscillation period can be well used in optical switch and optical memory elements. Particularly,...
This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light...
We experimentally demonstrate a silicon nano-wire actuator with a nano-scale resolution and tunable actuation range. The nano-scale resolution is obtained through implementing different control regulations, including coarse tuning by the electrostatic force and precision tuning by the optical force. More specially, the optical force enabled silicon nano-wire actuator can break the classical NEMS 1/3...
This paper reports a novel all-optical light tracker by taking advantage of the optomechanical modulation. The optical force generated by a light can be used to control another light without relying on the traditional nonlinear material. Particularly, the all-optical modulation can transfer the information in a signal light into another tracking light without resorting to electro-optical converting...
This paper reports a NEMS integrated photonic system, which integrate tunable laser, optical cross correct and variable optical attenuators. The NEMS integrated photonic system is fabricated with nano-silicon-photonic fabrication technology to integrate various functions in a single silicon photonic circuit chip. The high light-confinement capability of the nano-silicon waveguides guarantees superior...
This paper reports a silicon-silicon anodic bonding process based on embedded glass. We successfully embedded glass into patterned silicon groove by fusion treatment and bonded it with another silicon wafer by anodic bonding process. This process realizes the precise control of bonding pattern and the depth of the bonding gap without electrical connection between two silicon wafers. Tension test result...
This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 µs is experimentally demonstrated...
We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely...
This paper reports an on chip nano-optomechanical SRAM, which is integrated with light modulation system on a single silicon chip. In particular, a doubly-clamped silicon beam shows bistability due to the non-linear optical gradient force generated from a ring resonator. The memory states are assigned with two stable deformation positions, which can be switched by modulating the control light's power...
This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be...
In this paper, a tunable THz lens array based on reconfigurable metamaterials is reported. The metamaterial consists with 40 × 40 liquid metal microdroplets, in which the shape is tuned under different air pressures. The droplets are formed by injecting the liquid mercury into a pre-designed microchannel network and arranged to focus incident THz wave. The focus spot size can be tuned with different...
This paper describes the design of a digital closed drive loop for a MEMS vibratory, vacuum packaged gyroscope. The displacement of the gyroscope is demodulated by the adaptive filter-least mean square (LMS) though which the amplitude and phase of the displacement are separated for respective control. The amplitude is kept constant by the automatic gain control (AGC) method with a proportion-integral...
This paper reports a parylene-coated nMOSFET (n-type metal-oxide-semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along <;110> direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers...
A reflection-type MEMS multifunction-integrated optical device using the combined in-plane and out-of-plane motion of a dual-slope mirror is proposed. The motion of the mirrors results in the corresponding optical axis offsets in the transmitting and receiving optical signals, which can enable the device with variable optical power splitting, optical switching and variable optical attenuating functions...
This paper reports for the first time a novel highly-ordered three-dimensional (3D) petal-like arrayed structure (PLAS) which can serve as an ideal substrate for surface-enhanced Raman scattering (SERS). The structure is achieved by anisotropically etching a hexagonal close-packed silica nanoparticle (SNP) bilayer coated on a silicon substrate through evaporation-induced self-assembly, and then depositing...
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