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The work studies to apply a novel FPGA (Field Programmable Gate Arrays) technology to realize a motion control IC for wafer-handling robot which has three-DOF (Degree of freedom) and each axis is driven by PMSM (Permanent Magnet Synchronous Motor). The motion control IC proposed in this paper has two modules. The first module is a Nios II processor which is used to realize the motion trajectory computation...
The new field programmable gate array (FPGA) technologies enables a Nios-II multiprocessor and an application IP to be integrated into an SoPC (system on a programmable chip) developing environment. Therefore, this study presents a motion control IC for XYZ table under this SoPC environment. Each axis of XYZ table is driven by a permanent magnetic synchronous motor (PMSM). In implementation, it has...
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