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We describe the design and fabrication of a resonant absolute MEMS pressure sensor using a semi-custom fabrication process. We selected a double anchored Double-Ended Tuning Fork (DETF) resonator for this work. The pressure sensor design is based on fabricating two resonant structures side by side using MEMS Integrated Design for Inertial Sensors (MIDIS) process, a commercial pure-play MEMS process...
We present a delta-sigma modulator in a standard CMOS process that is designed to operate over a wide temperature range from −55 ºC to 225 ºC. The circuit is implemented using IBM 0.13μm CMOS technology with 2.5V power supply. We applied constant-gm biasing technique and other design considerations to compensate performance degradation over temperature variation. Simulation results show that the modulator...
We present a capacitance readout interface circuit in bulk CMOS process which is functional at wide temperature range between −55ºC to 175ºC. The proposed circuit uses a sigma-delta technique to convert capacitance ratio into a digital output and is suitable to provide a high-accuracy digitized output for capacitive MEMS sensors. The circuit is implemented using IBM 0.13μm CMOS technology. Simulation...
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