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This paper presented a valveless micropump driven and sealed by dielectric elastomers (DEs). First, the planar DE actuator was designed and the diaphragm actuating performances were characterized. Then the micropump, containing a chamber and a pair of nozzle/diffuser, was fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 was sealed by adhesive tape and finally covered...