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A new transducer for superharmonic and subharmonic contrast imaging was designed. This transducer was constituted of two elements: the outer low frequency (LF) element was centered at 4 MHz while a high frequency element (HF) was centered at 14 MHz. The center element was pad printed using InSensor™ TF2100 PZT paste. The outer element was mould with Ferroperm™ Pz26 and a curved porous Ferroperm™ Pz37...
This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8 element membrane based devices dimensioned to operate in bending mode in the 1-10 MHz regime. The devices...
A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves...
The development towards smaller devices with more functions integrated calls for new and improved manufacturing processes. The screen-printing process is quite well suited for miniaturised and integrated devices, since thick films can be produced in this manner without the need for further machining. On the other hand, the process of screen printing thick films involves potential problems of thermal...
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