Serwis Infona wykorzystuje pliki cookies (ciasteczka). Są to wartości tekstowe, zapamiętywane przez przeglądarkę na urządzeniu użytkownika. Nasz serwis ma dostęp do tych wartości oraz wykorzystuje je do zapamiętania danych dotyczących użytkownika, takich jak np. ustawienia (typu widok ekranu, wybór języka interfejsu), zapamiętanie zalogowania. Korzystanie z serwisu Infona oznacza zgodę na zapis informacji i ich wykorzystanie dla celów korzytania z serwisu. Więcej informacji można znaleźć w Polityce prywatności oraz Regulaminie serwisu. Zamknięcie tego okienka potwierdza zapoznanie się z informacją o plikach cookies, akceptację polityki prywatności i regulaminu oraz sposobu wykorzystywania plików cookies w serwisie. Możesz zmienić ustawienia obsługi cookies w swojej przeglądarce.
This paper presents a method of electrically determining the permeability of patterned electroplated structures and brings together the simultaneous wafer mapping of magnetic permeability, electrical resistivity and mechanical strain of electroplated ferromagnetic films together with the thickness of the films and their composition. The wafer mapping of all these properties is implemented using set...
SU-8 is a negative epoxy based photoresist, which is widely used as a structural and dielectric layer in the fabrication of MEMS devices. However this material normally develops high levels of stress during processing. This paper reports detailed quantitative data following previous work, where Parylene-C has been proposed as a possible replacement for SU-8. In particular, this paper details the characterisation...
This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise...
This paper demonstrates a novel technique based on a coplanar waveguide (CPW) test structure for broadband characterization of the intrinsic permeability spectra of thin ferromagnetic films. This measurement is based on the analysis of S-parameters obtained using a CPW test structure connected to Vector Network Analyzer (VNA) in transmission. The specific feature of the test structure is a small 50Ω...
This paper reports the development of processing methods and test structures for the characterisation and evaluation of Parylene-C as an insulating structural layer material for integration with planar micro-inductors. The process involves the filling of high aspect ratio gaps between copper structures with Parylene and subsequent chemical mechanical planarisation. A test chip has been designed to...
The uncontrolled development of stress within MEMS deposited and processed films can be detrimental for both device performance and reliability. This work focuses on combining the data from previously reported strain measurements obtained from mechanical test structures with new nano-indentation measurements of Young's modulus on both micromachined films and cantilevers. Both strain and Young's modulus...
A dense plane periodical array of cylindrical magnetic nanodots has been fabricated using a lithographic mask formed by self-organization of polystyrene nanospheres. In this paper, we study collective static and dynamic magnetic behavior of this array. We find that this technique produces samples with reasonably small dispersion of magnetic parameters of individual dots. This is evidenced by magnetometry...
Podaj zakres dat dla filtrowania wyświetlonych wyników. Możesz podać datę początkową, końcową lub obie daty. Daty możesz wpisać ręcznie lub wybrać za pomocą kalendarza.