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A technology for fabrication of YBCO ramp junctions on a superconducting ground plane is developed and evaluated. The technology is based on a two-layer, S-I, structure or on a four-layer, S-I-S-I, structure grown in situ with YBCO superconductor and with multilayer insulator of PBCO/STO/PBCO. Ramps for junctions, via connections and crossovers are formed by Ar ion milling under rotation and the ramp...