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Achieving high quality measurements with continuous-time Delta-Sigma modulator based micromachined gyroscope systems requires matching the resonant frequencies of the drive and of the sense loops. This work presents a system that synchronizes and calibrates the frequency of the electrical filter to the resonance frequency of the sensor. It is employed in a fourth order continuous-time bandpass Delta-Sigma...
In this paper a novel system concept is presented for the implementation of lowpass sigma-delta (ΣΔ) modulators for micromachined gyroscopes. Within the electro-mechanical ΣΔ-modulator two modulation-stages are implemented, reducing the sampling frequency compared to bandpass- and conventional lowpass modulators by a factor of 4 and 100, respectively. By implementing two modulation-stages in the loop...
To achieve high quality measurements with micro gyroscopes it is essential to maintain a primary oscillation with a constant amplitude for a reliable detection of angular rotations with the Coriolis effect. This paper presents a self-oscillation drive loop for gyroscopes with a new amplitude regulation based on phase shifting. Instead of regulating the driving stage in order to control the oscillation...
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