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We propose a novel production method to fabricate high-efficiency thin-film poly-Si solar cells using flash lamp annealing (FLA) for crystallization of micrometer-order-thick p-i-n amorphous silicon (a-Si) structure, prepared by catalytic chemical vapor deposition (Cat-CVD, Hot-Wire CVD) on low-temperature glass substrates and following high-pressure water vapor annealing for defect passivation. The...
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