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This paper reports a novel silicon microcantilever sensor with an embedded n-type metal-oxide semiconductor field-effect transistor (nMOSFET) for the detection of relative humidity (RH) based on the surface stress sensing principle. The nMOSFET has a channel along <100> crystal orientation of (100) silicon, which is parallel to the microcantilever. The RH detection is realized by coating a thin...
This paper proposes a new finite-point based approach for efficient characterization of CMOS gate. The new method identifies several key points on the I-V and Q-V curves to define the behavior of the static CMOS gate. It targets performance metrics such as timing, short-circuit power and leakage in the presence of process variations. Experimental results validate the accuracy of the new approach and...
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