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A 2-D simulation system based on a 2-D dynamic cellular automata method, integrating aerial image simulation, exposure simulation, post-exposure bake simulation, and development simulation modules is presented for inclined ultraviolet (UV) lithography processes of thick photoresists such as SU-8 photoresists. To verify the simulation system, a series of experiments have been performed for SU-8 2000...
Most MEMS/NEMS devices are working on the harsh environment, such as high shock and temperature environment, ranging from aerospace science, automobile industry, mechanical engineering, to medical and safety engineering. The reliability of MEMS/NEMS devices is the most important issue today. MEMS devices must perform their required functions for the duration of the equipment's requirement profile...
This paper, for the first time, presents the accurate results of coupled fabrication process simulation and mechanical performance analysis of microstructures using cellular automata (CA) method. According to the process sequences and process parameters, the microstructures are accurately generated using the CA method. The mechanical performance of the microstructures obtained is then analyzed using...
A method for developing the equivalent lumped electrical circuit based on the mechanical description of MEMS structures is proposed, which is used to carry out the system-level simulation of the dynamic behavior of the electromechanically coupled clamped-beam. The main idea of the method is to take the maximum displacement for the common variable, develop the equivalent mechanical description with...
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