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In this paper, the microwave performance of coplanar waveguides (CPWs) fabricated on high-resistivity silicon (HRS) substrates with various polysilicon film thicknesses was investigated. CPWs were fabricated on p-type silicon substrates with resistivities of 6000-8000 ??-cm. Polysilicon films with thicknesses ranging from 100 to 900 nm were deposited by LPCVD, in which a 300 nm-deposited polysilicon...
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