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This study reports an improved approach to implement a carbon nanotubes (CNTs)-based flexible tactile sensor, which is integrated with flexible print circuit (FPC) and is capable of the detecting of normal and shear forces. The merits of the presented integration process are as follows, (1) patterned CNTs, electrical routing, and FPC are integrated and transferred to PDMS substrate by molding process;...
A flexible, highly-sensitive, and easily fabricated carbon nanotubes (CNTs) tactile sensor is reported in this paper. CNTs are grown and patterned on bulk-micromachined silicon substrate with 3-dimensional surface profile. After polymer molding, the CNTs with 3-dimensional distribution are successfully transferred onto a flexible PDMS with 3-dimensional tactile-bump. Advantages of presented tactile...
This study reports an easy approach to realize the flexible sensor array. The silicon-based sensor chip is discretized into small chip array. The rigid but small silicon-based pressure sensors and flexible polymer material are integrated to implement the flexible tactile sensor array. The electrical routings for sensing signals are achieved using the through silicon interconnects and electroplated...
This study reports a simple approach to implement a flexible CNTs tactile sensor to enable the detecting of normal and shear forces. The merits of the presented tactile sensors are as follows, (1) embedded patterned CNTs into polymer using simple Si-substrate molding process, (2) 3D distributed CNTs enable the detection of shear and normal forces, and (3) 3D polymer structure by molding as a tactile-bump...
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