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In this study, a novel piezoresistor (PZR) design to improve the sensitivity of the piezoresistive type pressure sensor is reported. In this design, the PZR combined with various doping concentrations and doping depths is proposed and implemented. According to the design concept, the combined PZR which includes multiple piezoresistance coefficients would be arranged in a unique shape, just like a...
A stress isolation guard-ring to reduce the unwanted signals induced by the environmental disturbances for a packaged three-axis piezoresistive accelerometer is proposed [1–2]. This study further reports an optimum design to shrink the size of guard-ring, yet maintain the performance of accelerometer. The commercial finite element analysis (FEA) software, CoventorWare, is employed to evaluate the...
This study designs and implements a stress isolation guard-ring structure to improve the performances of the existing single proof-mass 3-axis piezoresistive accelerometer. Thus, the environment disturbances (temperature variation and force/deflection transmittance) for such packaged 3-axis piezoresistive accelerometer are significantly reduced. Measurements demonstrate the guard-ring design successfully...
This study reports a systematic approach to achieve optimal design of a piezoresistive sensor under the limitation of fabrication capabilities. The commercial finite element analysis (FEA) software, CoventorWare, is employed to evaluate the candidate designs of a piezoresistive pressure sensor. The Taguchi's robust design method is further employed to consider the deviation from manufacturing (e.g...
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