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Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration...
MEMS resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules, etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce power consumption for portable applications. However, the sensitivity is deteriorated by piezoelectric film due to its energy dissipation. This paper reviews our...
The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power...
This paper presents a new wafer-scale micromachining technology of vertically Si/metal laminated cantilever (3D micro cantilever). The 3D cantilever consists of vertically laminated structure so that it works in the in-the-plane mode, which is totally different from those traditional cantilevers of planar laminated configuration. The vertically laminated configuration has the advantage of easy-to-package,...
MEMS-based micro direct methanol fuel cells (muDMFCs) have poor performance because polymer electrolyte membrane fuel cell (PEMFC) is not well compatible with MEMS process. In this work, fine pattern was formed on PEM using nanoimprint technology. Using the nanoimprint PEM, a MEMS-based muDMFC was fabricated. The MEMS-based muDMFC had the open circuit voltage (OCV) of 0.74 V and the maximum power...
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