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In patients with neuromuscular disorders, microcirculation abnormalities in muscle tissues and angiogenesis affect pathomechanism. A total of 57 patients from 1.3 to 47.7years old with Duchenne muscular dystrophy (DMD), a total of 19 patients from 1.7 to 67.7years old with myotonic dystrophy (DM), a total of 31 patients with spinal muscular atrophy (SMA) from 3.0 to 58.3years old and 14 healthy controls...
We performed automatic classification of wafer test maps and analyzed data for machines with trouble. We detected patterns that had periodicity in the fail chip distribution and performed the machine difference analysis. If the lithography process is the origin of the periodicity pattern, we classify it as a shot failure. We analyzed the machine data and specified the root cause of the shot failure...
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