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Miniaturised ultrasound transducer arrays with integrated electronics will in future enable significant advances in high resolution medical imaging and in acoustic tweezing for bioscience research. However, their development has been limited by challenges in scaling down conventional piezoelectric ultrasound transducer fabrication and interconnection techniques. Piezoelectric thin film transducers...
Lead zirconate titanate piezoelectric films were integrated into prototype one-dimensional array transducers. The geometry used for transducer arrays is a xylophone-bar type with a length:width aspect ratio greater than 5:1 in order to isolate the desired resonance modes. The PZT and remaining films in the stack were patterned using ion-beam etching and partially released from the underlying silicon...
A fully custom designed CMOS transceiver chip for high frequency ultrasound imaging applications is described. The chip consists of nine transceiver channels with a programmable beamformer. On the chip, 8 bit 250 MS/s A/D converters digitize analog signals from the transducers and nine 3 Kbyte/channel SRAM store the digitized data for each of the nine channels. The chip was fabricated in a 0.35 mum...
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