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This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge,...
This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type...
This paper reports an electrodynamic anti-adhesion technique to detach particles adhered to the wall of microchannels. Electrodynamic disturbance is generated by applying electric potential at the frequency of 100 Hz to the interdigitated electrodes integrated at the bottom of the microchannel. Polystyrene latexes, ranging in diameter from 0.5 to 1.1 mum, were supplied to the microchannel. Before...
This paper demonstrates a hybrid particle classification and condensation device based on both aerodynamics and electrostatics using a micro virtual impactor (muVI). The muVI is capable of classifying the nanoparticles according to their size and condense their number concentration that we are interested. The muVI was fabricated using polymer micromachining. Its classification efficiency was examined...
This paper demonstrates a hybrid jetting system (HJS) using both electrohydrodynamic (EHD) force and mechanical actuation to generate ultra fine droplets with drop on demand (DOD). In the proposed HJS, liquid meniscus was formed by a piezoelectric actuator and jets were generated by EHD force. Jetting characteristics were also examined for hydrophobicity and hydrophilicity of a surface of a capillary...
Electrohydrodynamic jet printing (EHDP) technique is widely used for the direct writing. However, in the existing EHDP method, the printing characteristics are affected by the printing substrate used, and the printed line width is determined by the geometry of the nozzle. We propose an EHDP method which is capable of (1) removing the effect from the substrate, and (2) controlling the line width through...
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