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This paper presents the multi-objective geometric design exploration and optimization of an electrostatic Symmetric Toggle RF-MEMS switch (STS), considering both the electromechanical and RF characteristics simultaneously. The output responses considered for the STS switch optimization are pull-in voltage, switching time, insertion loss in the on-state and isolation in the off-state. Metamodels for...
This paper presents the effect of the thermally induced residual stress on the RF characteristics of capacitive shunt Symmetric Toggle MEMS Switch (STS). The formation of residual stress is attributed to the thermal loading-unloading cycle of the switch at high temperatures during microfabrication process. Initially, 3D nonlinear FEM models are developed to simulate the thermal loading cycle and resultant...
The goal of this study is to accurately distinguish between finger tremors of Parkinson's disease and other movement disorders using a tri-axial gyroscope. Finger tremor is specifically studied here as compared to hand tremor since farther distance from radio-carpal joint results in better acquisition of tremor signal. This study is an effort towards providing physicians with a clinical decision support...
Radio frequency microelectromechanical systems (RF-MEMS) switches exhibit significant variations in the electrical, mechanical and thermal properties of their constituting materials after different microfabrication processes. During the cycle of thermal loading and unloading in the process of plasma etching, non-homogeneous tensile residual stress is formed in the microbeams of RF-MEMS Symmetric Toggle...
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