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The optical, electrical and structural properties of thin film tin oxide (TO), F-doped tin oxide (FTO; n F ≈6×10 20 cm −3 ) and highly F-doped tin oxide (hFTO; n F ≈10×10 20 cm −3 ), grown by spray pyrolysis technique, are studied by atomic force microscopy, Hall effect, X-ray fluorescence and transmission/reflection measurements. The resistivity (ρ=32×10...