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The ion temperature in N 2 /Ar and O 2 /Ar electron cyclotron resonance (ECR) plasma is measured by high-resolution optical emission spectroscopy for pressure of 0.27 Pa and microwave power of 2.4 kW. It is found that as the nitrogen gas concentration is increased, the ion temperature in N 2 /Ar ECR plasma decreases drastically and the uniformity of the radial electron density...
Ion temperatures in N 2 /Ar and O 2 /Ar electron cyclotron resonance (ECR) plasmas have been measured with high-resolution optical emission spectroscopy. It was found that the Ar ion temperature in N 2 /Ar plasma decreased drastically as the nitrogen gas concentration was increased, while the electron temperature slightly increased. The uniformity of the radial electron density...
The nitrogen molecular dissociation level in 915 MHz ECR plasma was evaluated as a function of the electron temperature by optical emission spectroscopy. The intensity ratio of N line to N 2 line, which provides information on changes in the degree of dissociation of nitrogen molecules, was found to increase monotonously from 0.01 to 0.07 with increasing the electron temperature from 2 to...
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