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SEM review samples of bright field inspection results can be one or more orders of magnitude smaller than the defect count. Because of this, there is a risk of the sample set not adequately representing the actual yield risk of the defect population, especially if systematic defects are present. Furthermore, SEM review based on this method is often inefficient due to "SEM non-visual", nuisance...
This paper describes an integrated methodology that combines short-flow test chips useful for exploring process-design systematic as well as random failure modes and an advanced inspection tool platform to characterize and monitor key Defects-of-Interest for accelerated defect-based yield learning at the 65 nm technology node. Utilization of a unique fast electrical testing scheme, rapid analysis...
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