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Primary standard gas flow meters are developed for various applications such as calibration of leak artefacts, generation of calibration pressures by dynamic gas expansion and calibration of secondary standard gas flow meters. The Istituto di Metrologia “G. Colonnetti” (IMGC), Italy, and the University of Applied Sciences Giessen-Friedberg (UASG), Germany, maintain primary flow meters based on different...
The conventional Pirani gauge has poor performance at atmospheric pressures since here the stationary thermal conductivity of gases saturates. In contrast, the heat capacity of the gas does not saturate. It is accessible by a pulsed operation of the wire. The present paper gives an investigation of the Pirani gauge signal for the non-stationary heating and cooling processes. As follows from the experimental...
According to all testing procedures which have been standardized so far, the pumping speed of vacuum pumps is measured by injecting a stationary flow of gas into a test dome and measuring the equilibrium pressure. This stationary method is difficult to automatize due to the problem of automatizing the generation of gas flows over the required range of several decades. Alternatively, the pumping speed...
Precisely known gas flows are required in various applications, as, for example, in generation of uhv calibration pressures, testing of vacuum pumps, and quantification of leak rates. Commercial thermoelectrical flow meters are convenient instruments, but neither fundamental nor available for small throughputs. Laboratory flow meters based on the volumetric method at constant pressure are well proven...
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