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Structural and microelectrical properties of grain boundaries (GBs) in polycrystalline Si thin films were investigated by electron backscattering diffraction (EBSD) and scanning capacitance microscopy (SCM). The SCM measurements revealed highly nonuniform carrier depletions among the GBs, indicating the variety of electrical properties due to the specific GB structures. The EBSD measurement showed...
The combination of high electric fields and moisture from the environment can lead to electrochemical reactions causing corrosion, which can severely impact microelectromechanical systems (MEMS) device reliability and lifetime. In this paper, we present a detailed study of the corrosion behavior and surface passivation methods for enhancing the corrosion resistance of surface micromachined polycrystalline...
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