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We prepared a series of (In 2 O 3 ) x (Ga 2 O 3 ) y (ZnO) 1−x−y (0.7≤x≤0.8, 0.05≤y≤0.15) (IGZO) thin films using the pulsed laser deposition (PLD) method at room temperature under same oxygen pressure. The structural, optical and electrical properties of the grown films were measured by various diagnosis tools. X-ray diffraction (XRD) patterns...