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To improve the image resolution of thermal imagers, which image objects by uncooled Focal Plane Arrays (FPAs) made up of two-dimension Infra-red (IR) detector arrays, detector size is decreased, and this results in the reduction of detector IR absorber area . However, reduction of IR absorber area may affect IR detector's sensitivity accordingly. In order to reduce the detector size without reducing...
In the field of manufacturing of micro-system, the Pyrex7740 glass is a widely-used material since its coefficient of thermal expansion is similar to that of silicon and it has good optical performance for optical sensors and actuators. The use of Pyrex7740 glass is limited by its isotropic etching characteristic. In this paper, a new wafer-level process to precisely fabricate deep cavities on the...
In the domain of manufacturing and packaging of micro-system, the Pyrex7740 glass is a widely-used material since its coefficient of thermal expansion is similar to that of silicon, and its good optical performance for biosensors and optical sensors. But the use of Pyrex7740 glass is limited for its isotropic etching characteristic of tradition micro-machining. In this paper, we present a new process...
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