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Compared with superconducting quantuminterference devices, chip-scale atomic magnetometersusing the wafer-level micro alkali vapor cells can be usedmore conveniently in the applications of geophysicalmapping, health care and remote monitoring. Drasticwall collisions and decreased polarization lifetime arethe main barriers for the performance of the chip-scaleatomic magnetometers. In this study, OTS...
Atomic magnetometer operating in spin-exchange-relaxation-free (SERF) regime has a wide range of applications due to its ultra-high sensitivity. However, the requirement of operating in near-zero magnetic field restricts some of the applications which need the atomic magnetometer to work in the high field environment such as monitoring the magnetic anomalies. A novel scheme of the chip-scale SERF...
This paper focuses on geometry influence of the micro alkali vapor cell on the sensitivity of the chip-scale atomic magnetometers. For the first time, by using micro spherical alkali vapor cells instead of traditional micro planar alkali vapor cells, we demonstrate a chip-scale atomic magnetometer with a ten-fold improvement in sensitivity experimentally. Besides, results also show that the micro...
In order to meet the need of high integration and low cost of wireless communication systems, passive devices are widely used in all kinds of systems. This paper introduces an innovative method to manufacture integrated passive inductors based on glass reflow process. IPDs(integrated passive devices) have been simulated by 3D EM(electromagnetic) simulator software HFSS(high frequency structure simulator)...
Highly sensitive optical magnetometers present high performance in detection of biological magnetic fields from the heart or the brain and have impact on other areas as diverse as magnetic resonance imaging, space science and remote monitoring. A chip-scale SERF-regime optical magnetometer based on a MEMS process is fabricated instead of a large-chamber one and the optical module and the vapor cell...
The importance of the atomic magnetometer hasalready been widely recognized and it is an emergency to come up with portable atomic magnetometers with highperformance. The scalar magnetometer with its uniqueproperty of merely sensitive to the magnitude but relativelyinsensitive to the direction of the ambient magnetic field. This work presents a novel solution which combines two types of scalar atomic...
Inductor is a key passive component in radio-frequency integrated circuits (RFICs). Compared with other components in the circuit, inductor has a bigger size, hence its miniaturization is critical for integrated circuit system. Most of conventional on-chip inductors fabricated on silicon substrates are planar structures, and have low quality factor (Q) due to the substrate loss of low-resistivity...
Micro-fabricated optical magnetometers as themost sensitive magnetic field sensors play a significant role in avariety of areas ranging from health care and nuclearmagnetic resonance to fundamental atomic physics researchand remote monitoring. Optoelectronic integration is the mainbarrier for the performance of the micro-fabricated opticalmagnetometer. In this study, by using micro alkali vapor cellwith...
Here we present the fabrication process for silicon-in-glass electrodes as capacitive transducers. The embedded electrodes are formed by utilizing a glass reflow process. DRIE process easily defines the number and shape of these embedded silicon electrodes. Eight, sixteen, twenty-four electrodes are obtained through this process. These silicon-in-glass electrodes are anticipated to be operated to...
The paper presents a novel design for chip-scale atomic magnetometers using a micro spherical rubidium vapor cell. By modeling and calculation, it was found that compared with the traditional planar rubidium vapor cell with approximately the same internal volume and buffer gas pressure, the micro spherical rubidium vapor cell was demonstrated with improved polarization lifetime and optical length...
To maintain a controllable environment for microalkali vapor cells of high-performance chip-scale atomic devices, a novel wafer-level hermetic all-glass packaging technology for microalkali vapor cells of atomic devices was investigated. A glass wafer with metal vias was used as the substrate to host the miroalkali vapor cells. Wafer-level hemispherical glass bubbles prepared by a chemical foaming...
This paper explores a Chemical Foaming Process (CFP) as an enabling mechanism for creating 3-D structures such as hemispherical shells. The Chemical Foaming Process utilizes the thermal decomposition of the foaming agent, TiH2 in the paper, to increase the air pressure in the cavity to foam Pyrex 7740 glass into 3-D smooth and symmetric wineglass shells under high temperature. The Chemical Foaming...
High sensitive SERF(spin-exchange-relaxation-free) atomic magnetometers play an important role in many fields including geophysical mapping, space science, nuclear magnetic resonance, health care and perimeter and remote monitoring. This paper presents a novel approach for the system integration of a SERF atomic magnetometer. First of all, Rb vapor cell integrated with micro heater and Helmholtz coils...
Technologies for the embedding of active and passive components into the multilayer substrate can effectively reduce the circuit length, improve the electrical performance and thermal properties through the designing of thermal path. It allows a large extent miniaturization of products' size and makes high density packaging enabled. In this paper, we embedded the organic interposer with flip-chip...
A wafer-level micro silicon heater based on the highly-doped silicon wafer is demonstrated in the system of chip-scale atomic magnetometer. We showed the fabrication process on a 4 inch wafer. Different voltages are applied to the heaters and the temperatures of vapor cell are tested by temperature sensor in order to get the heating efficiency of heaters, also optical heating is tested to make a comparison...
A wafer-level optical package solution for chip-scale atomic magnetometers is presented, which is based on microelectronic fabrication process on a 4 inch wafer. A module is fabricated following the process. By measuring the intensity of the light, it is indicated that the quality of parallelism and polarizability of the laser beam from a Vertical Cavity Surface Emitting Laser (VCSEL) in the module...
High sensitive atomic magnetometers play an important role in many fields including geophysical mapping, space science, nuclear magnetic resonance, health care and perimeter and remote monitoring. In this study, a novel method to fabricate the micro spherical Rubidium vapor cell has been investigated and the integration of micro spherical rubidium vapor cell in 3-axis atomic magnetometer has been...
This paper presents a new and simple fabrication method, Chemical Foaming Process (CFP), to prepare 3-D wineglass resonant shells for gyroscope application. The gas evolved by the thermal decomposition of the foaming agents is used as the driving force to foam the glass into 3-D smooth and symmetric hemispherical structures. The 3-D structures are characterized by Scanning Probe Microscope (SPM) and...
As glass has the superiorities of insulation, chemically stability, low coefficient of thermal expansion (CTE), and transparency for internal reliability monitoring, it is proposed as an alternative interposer material to organic and silicon. Increasing demand for miniaturization and integration of devices calls for new packaging method like packaging-embedded packaging. Considering the upper two...
Rapid on-line detection of liquid density is crucial in petroleum, pharmaceutical, food processing industry and chemical industries. In this article, we present a novel resonating liquid densitometer with a micro hemispherical glass shell suitable for integration with microfluidic systems. The fluid density is measured via the change in resonant frequency caused by an added mass of fluids. The densitometer...
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