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In this paper a review is presented about recent developments of using sigma-delta modulator (SDM) control systems for micromachined, capacitive vibratory rate MEMS gyroscopes. The design choices, their benefits and disadvantages are briefly discussed. As the most promising control system, a higher order, band-pass SDM is identified since it achieves high quantization noise shaping at a relatively...
With the industry development, high acceleration motion stages are widely used in many fields due to their merits of short manufacturing period. However, the inertia always slows down the systems response, which degrades the system performance drastically. In order to make full use of the high acceleration motion stages, it is necessary to design controllers to deal with the inertia influence. In...
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